SUNY Polytechnic Institute (SUNY Poly) introduced immediately that Empire Innovation Professor of Nanoscale Science Dr. Alain Diebold has acquired funding from Onto Innovation Inc (“Onto Innovation” or “Onto”) to extend the aptitude of pc chip reminiscence by characterizing the supplies and multilayer constructions that are used to manufacture high-aspect ratio 3D reminiscence chips, equivalent to DRAM. DRAM is used to briefly retailer knowledge to effectively entry and replace code whereas an individual interacts with their pc. This analysis initiative will deploy metrology strategies to exactly measure the reminiscence chip constructions as a way to allow high-volume manufacturing.
“I’m proud to congratulate Professor Diebold on this new analysis funding, which may finally spur larger understanding concerning the methods during which measurements of form and dimensions of DRAM constructions may be optimized to drive improved reminiscence chips and their high-volume manufacture,” mentioned SUNY Poly Appearing President Dr. Tod A. Laursen. “This analysis effort dovetails properly with the latest information that reminiscence chip maker Micron is reworking Central New York into a world, modern manufacturing hub, and SUNY Poly will proceed to offer pupil analysis expertise on this crucial discipline.”
“This analysis is a testomony to Dr. Diebold’s experience, leveraging the superior capabilities of SUNY Poly’s metrology laboratories along with its business partnerships with Onto Innovation, all of which concurrently present a robust platform for graduate pupil studying,” mentioned Dr. Nathaniel Cady, SUNY Poly Interim Vice President of Analysis; Empire Innovation Professor of Nanobioscience.
Extra particularly, this analysis will use the distinctive capabilities of Mueller Matrix Spectroscopic Ellipsometry and Rigorous Couple Wave Evaluation coupled with Ai Diffract™ software program from Onto to advance optical scatterometry for measurement of the form and dimensions of 3D DRAM methods fabricated from silicon/silicon germanium (Si/SiGe) superlattice constructions.
“I applaud Dr. Diebold for receiving this grant from Onto, which is a good instance of the superior analysis undertaken by our boundary-pushing SUNY Poly college, in addition to the extremely related workforce preparation that college students attending SUNY Poly are in a position to acquire by working carefully with college,” mentioned SUNY Poly Interim Dean of the School of Nanoscale Science and Engineering (CNSE) Dr. André Melendez.
As well as, the three-year mission will assist graduate pupil studying whereby supplies and constructions used to manufacture 3D DRAM shall be characterised through the use of X-ray and optical strategies. This analysis will emphasize the measurement of check constructions to find out function form and dimensions, amongst different properties.
“I’m grateful to Onto Innovation for this assist and for our partnership to facilitate mass manufacturing of next-gen reminiscence chips,” mentioned Professor Diebold. “I additionally look ahead to enabling this pupil analysis alternative which showcases the methods during which SUNY Poly prepares college students for the superior careers that enhance the applied sciences on which we rely.”
Dr. Diebold is co-author of Optical and Electrical Properties of Nanoscale Supplies, with Tino Hoffman (UNC), printed in January 2022 by Springer Nature. The guide supplies an outline of the optical and electrical properties of 2D supplies together with graphene, transition steel dichalcogenides, and topological supplies. When potential, the optical properties are associated again to the digital band construction.
Along with his earlier work with SEMATECH, Dr. Diebold had additionally held a senior-level analysis place with Allied Sign, now Honeywell. He has greater than 90 technical publications, 50 invited shows, and quite a few guide chapters.
Supply: http://www.sunypoly.edu
